Target processing technology
1. Powder metallurgy of sputtering target:
Hot press(HP)
Hot pressing is one of the powder metallurgy processes. The powders will be hotly pressed and sintered to be uniformly dense. The applied pressure is divided into static and dynamic, with uniaxial or biaxial pressure direct contact pressure, the sintering is a forming method by heating various powder together. The bulk density is related to pressure, time, temperature, particle size and so on.
Advantage:
Uniform composition
Suitable for high melting material
Avoid the air hole or sand hole
Suitable for hard or brittle production
High repeatability
2. Vacuum Induction Melting(VIM) of sputtering target:
A process is that a metal is melted by electromagnetic induction in a vacuum. Molten metal is produced by producing eddy currents in the metal. Usually casting liquid metal material poured into a mold, cooled and solidified to form a casting.
Advantage:
Low costs
High impurity、Low gas content
High production efficiency
High recycling ability
Hot press(HP)
Hot pressing is one of the powder metallurgy processes. The powders will be hotly pressed and sintered to be uniformly dense. The applied pressure is divided into static and dynamic, with uniaxial or biaxial pressure direct contact pressure, the sintering is a forming method by heating various powder together. The bulk density is related to pressure, time, temperature, particle size and so on.
Advantage:
Uniform composition
Suitable for high melting material
Avoid the air hole or sand hole
Suitable for hard or brittle production
High repeatability
2. Vacuum Induction Melting(VIM) of sputtering target:
A process is that a metal is melted by electromagnetic induction in a vacuum. Molten metal is produced by producing eddy currents in the metal. Usually casting liquid metal material poured into a mold, cooled and solidified to form a casting.
Advantage:
Low costs
High impurity、Low gas content
High production efficiency
High recycling ability
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